| 摘要 |
PURPOSE: A wafer moving apparatus is provided to prevent the damage of a wafer by dropping a speed using the buffering of the air pressure when a boat elevating apparatus suddenly drops. CONSTITUTION: A body frame(11) is prepared on one side of a processing chamber(30). A lead screw(13) is installed inside the body frame in the vertical direction. A guide bar(14) is installed on both sides of the lead screw to be separated. A boat stage(17) is combined with the lead screw, and a boat is mounted on the upper side mount. A motor(M) transfers the torque to the lead screw. The impact buffer part drops the speed of the boat stage in the sudden drop of the boat stage with the buffering of inside.
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