| 摘要 |
<p>The invention relates to a rotary speed sensor (100) comprising a tuning fork-shaped oscillator (30) having a first electrically conductive prong (11 a) and a second electrically conductive prong (11 b) located at a distance therefrom, wherein the first prong (11 a) and the second prong (11 b) are connected to each other via a base (12). The rotary speed sensor (100) further comprises a web (21) connecting the base (12) to an electrically conductive substrate (1), and a readout device (20) for detecting vibrations of the oscillator (30), wherein the oscillator (30) has a uniform potential and is electrically insulated from one or more excitation electrodes (14) arranged adjacent to the prongs (11 a, 11 b), in order to allow electrostatic excitation between the prongs (11 a, 11 b) and the excitation electrodes (14). The rotary speed sensor has a simple design and is simple to control and read.</p> |
