发明名称 Method for ejecting liquid material, method for manufacturing organic electroluminescense device, and method for manufacturing color filter
摘要 A method for ejecting a liquid material includes classifying the plurality of nozzles of a head into a plurality of nozzle groups having different landing position accuracies for droplets; and performing ejection includes main scanning for ejecting droplets of the liquid material through selected nozzles while generating relative movement in a main-scanning direction between the head and a target substrate, and sub-scanning for generating relative movement between the head and the target substrate in a sub-scanning direction orthogonal to the main-scanning direction. The main scanning and the sub-scanning are performed separately for each of the plurality of nozzle groups. During the sub-scanning, relative movement is generated in accordance with correction information for the corresponding nozzle group for correcting landing positions of the droplet. During the main scanning, a droplet is ejected through at least one nozzle selected from the corresponding nozzle group.
申请公布号 US7662423(B2) 申请公布日期 2010.02.16
申请号 US20080119127 申请日期 2008.05.12
申请人 SEIKO EPSON CORPORATION 发明人 HANAOKA HIDETAKA
分类号 C23C16/52;B05D5/12;C23C28/00 主分类号 C23C16/52
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