发明名称 ELECTRIC INSPECTION APPARATUS AND ELECTRIC INSPECTION METHOD FOR INSPECTING ELECTRIC INSPECTION SAMPLE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an electric inspection apparatus for inspecting an electric inspection sample that has high contact certainty and operation certainty and correctly inspects the electric inspection sample. <P>SOLUTION: This electric inspection apparatus for inspection of the electric inspection sample has a conductor substrate electrically bound to an inspection head via a transformer of a contact section interval, and the conductor substrate is mechanically bound to a first reinforcing device and is reinforced by it. At least one spacer (30) penetrating the conductor substrate (12) is mechanically bound to the transformer (7) of the contact section interval, and is intended to be held via an inclination adjusting means (34) in the first reinforcing device (26). <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010032519(A) 申请公布日期 2010.02.12
申请号 JP20090172653 申请日期 2009.07.24
申请人 FEINMETALL GMBH 发明人 BOEHM GUNTHER;KOPILAS BERISLAV;EHRLER SYLVIA;HOLOCHER MICHAEL
分类号 G01R1/073;G01R31/26;H01L21/66 主分类号 G01R1/073
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