| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacitance type acceleration sensor that can prevent a mass body from being stuck to a rear side glass substrate and a front side glass substrate by an electrostatic force and prevent a mass body from being damaged when it receives an excessive impact, and to provide a method for manufacturing a capacitance type acceleration sensor capable of using an inexpensive material easy to process as a sticking prevention film and an impact absorption film to be formed on the rear side glass substrate and the front side glass substrate at respective recessed portions. Ž<P>SOLUTION: Layers 8A, 8B made of Al (Ni or Ti can be used) are respectively provided on the rear side and front side glass substrates 6, 7 at the respective recessed portions 6a, 7b so as to form sticking prevention films and impact absorption films. In the manufacturing process, a protection cover of a silicon nitride film is formed on the layer 8B so as to prevent the layer 8B from being damaged when etching a substrate 1. After that, the protection cover is removed. In addition, a corner portion of the mass body 41 is chamfered. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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