| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for scanning in a raster mode, particularly, a raster microscope, that quickly and inexpensively compensates the disturbing effects of mechanical vibrations on the scanning process. SOLUTION: The device includes a sensor that senses mechanical vibrations and drives a filter whose output is connected to an adder together with the output of a z-signal generator. The output of the adder drives a device that changes the distance between a sample and the sensor. COPYRIGHT: (C)2010,JPO&INPIT |
