| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dielectric structure for easily controlling the discharging condition of plasma. <P>SOLUTION: The dielectric structure 1 includes a dielectric substrate 2, a first electrode 4a provided on a first surface S1 of the dielectric substrate 2, and a second electrode 4b provided inside the dielectric substrate 2 or on a second surface S2 opposite to the first surface S1 of the dielectric substrate 2. The dielectric structure 1 can generate plasma around the first electrode 4a when voltage is generated between the first electrode 4a and the second electrode 4b. The first electrode 4a has a plurality of protruded portions P protruded along the outer periphery in parallel to the first surface. <P>COPYRIGHT: (C)2010,JPO&INPIT |
