| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid droplet ejection head in which the highly reliable liquid droplet ejection head excellent in dimensional accuracy and chemical resistance and capable of performing high-quality printing for a long period of time is efficiently manufactured. Ž<P>SOLUTION: The method for manufacturing the liquid droplet ejection head has a process for preparing a sealing plate comprised of a sealing sheet 30 and a diaphragm 40 joined to each other, a process for forming a joining film 15 on a nozzle plate 10 and forming a joining film 25 to an undersurface of the sealing plate, a process for applying an energy to each of the joining films 15 and 25, and a process for simultaneously joining three members of the sealing plate, a delivering liquid storing chamber forming substrate 20 and the nozzle plate 10 so that the joining films 15 and 25 stick to the delivering liquid storing chamber forming substrate 20. Each of the joining films 15 and 25 is formed by the plasma polymerization method, including both an Si-skeleton with a random atomic structure which includes a siloxane bonding, and a leaving group bonded with the Si-skeleton. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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