发明名称 |
MAGNETIC PAD FOR END-EFFECTORS |
摘要 |
Embodiments of the present invention relate to apparatus and method for supporting and transferring large area substrate in a vacuum condition. One embodiment of the present invention provides an apparatus comprising one or more end effectors having a plurality of end effector pads disposed thereon without mechanically joining to the one or more end effectors. In one embodiment, a plurality of end effector pad assemblies are coupled to one or more end effectors by magnetic force. |
申请公布号 |
WO2010017340(A2) |
申请公布日期 |
2010.02.11 |
申请号 |
WO2009US52919 |
申请日期 |
2009.08.06 |
申请人 |
APPLIED MATERIALS, INC.;KIM, KYUNG-TAE |
发明人 |
KIM, KYUNG-TAE |
分类号 |
H01L21/677;B25J15/06;B65G49/06;G02F1/13 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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