发明名称 |
Contamination barrier and lithographic apparatus comprising same |
摘要 |
A rotatable contamination barrier is disclosed that has a plurality of closely packed blades configured to trap contaminant material coming from a radiation source. The blades are radially oriented relative to a central rotation axis of the contamination barrier. The blades comprise a metal compound having crystals oriented generally radially relative to the central rotation axis.
|
申请公布号 |
US2009045357(A1) |
申请公布日期 |
2009.02.19 |
申请号 |
US20080285733 |
申请日期 |
2008.10.14 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
WASSINK ARNOUD CORNELIS |
分类号 |
G03F7/20;B01D46/00;B01D46/42;B21J5/06;B21K1/36;F24F1/00;F24F3/16;F24F13/28 |
主分类号 |
G03F7/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|