发明名称 LOW COST HIGH VOLTAGE POWER FET AND FABRICATION
摘要 A power field effect transistor (FET) is disclosed which is fabricated in as few as six photolithographic steps and which is capable of switching current with a high voltage drain potential (e.g., up to about 50 volts). In a described n-channel metal oxide semiconductor (NMOS) embodiment, a drain node includes an n-well region with a shallow junction gradient, such that the depletion region between the n-well and the substrate is wider than 1 micron. Extra photolithographic steps are avoided using blanket ion implantation for threshold adjust and lightly doped drain (LDD) implants. A modified embodiment provides an extension of the LDD region partially under the gate for a longer operating life.
申请公布号 US2010032774(A1) 申请公布日期 2010.02.11
申请号 US20090536200 申请日期 2009.08.05
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 BURGESS BYRON NEVILLE;PENDHARKAR SAMEER P.
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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