| 摘要 |
<p>Provided is an inspection device, which has a discharge preventing function thereby to detect an absorption current more efficiently. The inspection device comprises an absorption current detector mounted in a vacuum specimen chamber so that the detector is able to detect even a high-frequency absorption current signal of several tens of kHz or higher by reducing the electrostatic capacity of a signal line from a probe to the absorption current detector to about several pF. Moreover, a signal switching unit is actuated by a signal switching control unit in order to connect the probe having contacted the specimen and a signal line of a semiconductor characteristic analysis device, so that the electric characteristics of the specimen can be measured without any limitation of a signal path connected with the probe to the transmission of an absorption current. Moreover, the probe and a specimen stage are provided with resistors for the slow leak of electrification.</p> |
