Sensor membrane for pressure sensor, has two surfaces comprising profiles which are formed by corroding, where surfaces face each other and run parallel to each other and profiles are formed in form of concentric circles around center point

摘要

The membrane (1) has two surfaces (10, 20) comprising fine profiles which are formed by corroding, where the surfaces face each other and run parallel to each other. The fine profiles are formed in the form of concentric circles around a center point which is present on the respective surfaces. The membrane is installed in a sensor housing that is made of metal. The distance (30) between the surfaces is in the range of 10-150 micrometers. The membrane is made of raw material such as metal. Independent claims are also included for the following: (1) a method for manufacturing a sensor membrane (2) a method for manufacturing a pressure sensor.