发明名称 AN ELECTROMECHANICAL TRANSDUCER AND A METHOD OF PROVIDING AN ELECTROMECHANICAL TRANSDUCER
摘要 <p>The invention relates to an electromechanical transducer (100). The electromechanical transducer (100) comprises a cantilever beam (101) and an excitation unit (102) that is adapted for exciting a motion of the cantilever beam (101). A detection unit (103) is adapted for detecting an electrical signal (iout) in response to the excited motion of the cantilever beam (101).</p>
申请公布号 WO2010015963(A1) 申请公布日期 2010.02.11
申请号 WO2009IB53271 申请日期 2009.07.28
申请人 NXP B.V.;GOOSSENS, MARTIJN;VAN BEEK, JOZEF, T. M. 发明人 GOOSSENS, MARTIJN;VAN BEEK, JOZEF, T. M.
分类号 H03H9/02;H03H9/24 主分类号 H03H9/02
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