发明名称 |
Method and Apparatus of Tilted Illumination Observation |
摘要 |
A tilted illumination observation method and observation device with easy adjustment, high speed, good reproducibility and low cost is provided. A high resolution tilt image of a specimen is obtained by extracting the blurring on the scanning spot occurring during beam tilt from the image (step 6) captured by the tilted beam, and the image (step 4) captured from directly above the standard specimen; and then deconvoluting (step 11, 12) the tilted image of the target specimen (step 10) using the extracted scanning spot from the oblique beam.
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申请公布号 |
US2010033560(A1) |
申请公布日期 |
2010.02.11 |
申请号 |
US20090535021 |
申请日期 |
2009.08.04 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
KAWASAKI TAKESHI;NAKANO TOMONORI;HIROSE KOTOKO |
分类号 |
H04N7/18;G01N23/00;G01N23/20 |
主分类号 |
H04N7/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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