发明名称 |
Robust measurement of parameters |
摘要 |
A method of increasing consistency between separate parametric measurement readings that are taken with an electron beam imaging tool at different times within a period of time, by correcting drift in the imaging tool at a time frequency that is less than a time period during which the drift is anticipated to be undesirably large.
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申请公布号 |
US7660687(B1) |
申请公布日期 |
2010.02.09 |
申请号 |
US20060420243 |
申请日期 |
2006.05.25 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
DE INDRANIL;MCCORD MARK A.;ADLER DAVID L. |
分类号 |
G01D18/00;G06F17/40;G06F19/00 |
主分类号 |
G01D18/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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