| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a module which measures an internal and external atmospheric pressures of a chamber for processing of a semiconductor substrate, and also to provide an apparatus for measuring an atmospheric pressure and a method thereof. Ž<P>SOLUTION: The atmospheric pressure measuring module includes: a linkage member having first and second inflow parts in its side surfaces; a first atmospheric pressure measuring sensor connected to one end of the linkage member; and a second atmospheric pressure measuring sensor connected to the other end of the linkage member. The linkage member is provided with: a first passage for connecting the first inflow part and the first atmospheric pressure measuring sensor; and a second passage for connecting the second inflow part and the second atmospheric pressure measuring sensor. The first and second passages are provided to be separated from each other, and thus the atmospheric pressure measuring module, the apparatus and method of measuring an atmospheric pressure are provided. Since a problem of erroneous operation of the atmospheric pressure sensor is solved with such an arrangement, now unnecessary equipment which has been so far used to prevent the erroneous operation, and a time and human power consumption taken to cope with the erroneous operation, are reduced. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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