RESONANT CIRCUIT, OSCILLATION CIRCUIT, FILTER CIRCUIT, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a resonant circuit capable of controlling variation modes of resonant frequency of an MEMS resonator by a bias voltage. SOLUTION: The resonant circuit 30 comprises: a substrate; an MEMS resonator 10 including a fixed electrode formed on the substrate and a movable electrode having a movable portion opposing at least part of the fixed electrode; a first input-output part 30a connected to a first terminal 10a of the MEMS resonator; a second input-output part 30b connected to a second terminal 10b of the MEMS resonator; a voltage applying means 20 supplying a potential Vp to at least the first terminal 10a to apply a bias voltage Vc between the first and the second terminals of the MEMS resonator; and a variable capacitance Cc1 connected between the first terminal 10a and the first input-output part 30a to allow a capacitance value to be changed by a change in a potential difference between opposite ends of the variable capacitance. COPYRIGHT: (C)2010,JPO&INPIT