| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of detecting foreign matter sticking on the peripheral end of a substrate, with which even fine foreign matter smaller the detection limit of an existent measuring instrument, sticking on the peripheral end of the substrate is accurately detected, the method of detecting the foreign matter being suitable for inspection during mass-production of the substrate and also high in flexibility. SOLUTION: The method of detecting the foreign matter sticking on the peripheral end of the substrate includes a cooling step of freezing condensed moisture content 52 to grow crystal 53 of ice after cooling the wafer W to condense moisture content 51 in vapor phase at the periphery of a bevel portion polymer B as the foreign matter sticking on the peripheral end of the wafer W; and a peripheral end inspection step of detecting the bevel portion polymer B sticking on the peripheral end of the substrate emphasized by the crystal 53 of ice by the existent measuring instrument. COPYRIGHT: (C)2010,JPO&INPIT |
