| 摘要 |
PROBLEM TO BE SOLVED: To provide an oblique incidence interferometer capable of extending a measurement range without scale-up of the interferometer. SOLUTION: An oblique incidence interferometer 1 includes a light source 11 for radiating coherent light to an object W to be measured from a diagonal direction, a parallel light forming section 12 for converting the coherent light from the light source 11 to parallel light, a light flux splitting section 14 for splitting the parallel light from the parallel light forming section 12 into measurement light and reference light, a light flux synthesizing section 15 for synthesizing measurement light reflected by the object W with the reference light, and an image capture section 17 for capturing interference fringes indicative of a surface shape of the object W. The oblique incidence interferometer 1 further includes a measurement range extending means 10 for extending a measurement range of the light of the object W in a short axis direction of the measurement range. COPYRIGHT: (C)2010,JPO&INPIT |
