| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To return a wafer ring to an empty slot in a magazine without fail. <P>SOLUTION: The component supply device includes: a magazine mounting table 20 mounting a magazine 10 for housing a wafer held by the wafer ring 1, a magazine lifting mechanism 22 for moving the magazine mounting table in the vertical direction; an outlet port 42A for taking out the supported wafer ring 1 from a slot 12 in the magazine positioned at a predetermined height by the lifting mechanism; and a wafer taking-out mechanism which inserts a grasping tool from the outlet port into the magazine to grasp and draw out the wafer ring 1 supported at a corresponding position with the grasping tool. In the device, a sensor 56 for detecting presence of the wafer ring 1 supported in each slot 12 in the magazine 10 moved upward or downward is set at a predetermined height position, and stores information on presence of the wafer in the magazine wherein a detection signal by the sensor and each slot position are associated with each other when the magazine mounting table 20 is elevated or lowered. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
