摘要 |
PROBLEM TO BE SOLVED: To provide a particle transport device, capable of transporting particles with high efficiency by eliminating a singular point at which the particles stay. SOLUTION: The pattern of an application voltage to linear electrodes formed on a substrate is periodically and intermittently switched with the lapse of time. For example, among sine wave alternating voltages of 6 phases, the voltages of some phases are switched to the voltages of other phases at times of u=5, 10, and 15 of repetition of times u=1 to 15. According to this, particles can be transported with high efficiency without causing the singular point at which the particles stay on the arrangement space of the linear electrodes. COPYRIGHT: (C)2010,JPO&INPIT |