| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage apparatus smoothly moving a plurality of stages. <P>SOLUTION: The stage apparatus is provided with: a first member movable on a predetermined surface of a base member; a second member movable on the predetermined surface; and a holding device having a first holding mechanism movable in almost parallel to the predetermined surface while holding a first cable connected to the first member and a second holding mechanism movable in almost parallel to the predetermined surface while holding a second cable connected to the second member. With respect to a normal line direction of a predetermined plane, a distance between the first cable held by the first holding mechanism and the predetermined plane is different from a distance between the second cable held by the second holding mechanism and the predetermined plane. <P>COPYRIGHT: (C)2010,JPO&INPIT |
