IDENTIFIER OF TEST PIECE FOR SCANNING ELECTRON MICROSCOPE, HOLDER OF TEST PIECE FOR SCANNING ELECTRON MICROSCOPE, AND OBSERVATION METHOD OF TEST PIECE FOR SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To easily obtain corresponding relations of the kind of test piece observed and the image of electron microscope, even if the number of test pieces to be observed is very many. Ž

SOLUTION: An identifier P of test piece for scanning type electron microscope in which an aggregate of elements ekhaving a prescribed color uses the kinds cjof a prescribed color as one unit of information is utilized as an identification information. Each of the elements ekhas a prescribed secondary electron emission intensity ijor a reflection electron emission intensity corresponding to the kinds of the prescribed colors. Ž

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