COMPACT MULTILEVEL ELECTRICAL INTEGRATION OF MICROSYSTEMS

摘要

A microsystem comprising a substrate having an aperture formed therethrough. The aperture includes a first cross-section and a second cross-section-the first cross-section being smaller than the second cross-section to define a ledge therebetween. A probe member is disposed within the aperture of the substrate, such that a backend of the probe member defines a cross-section that is greater than the first cross-section of the aperture and smaller than the second cross-section such that the probe member engages the ledge. A plurality of probe shanks extend from the probe member. Each of the probe shanks includes a plurality of leads disposed there along. Each of the leads extending from the probe shanks to an opposing side of the probe member.