| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card capable of reducing the pitch between contact probes without increasing the number of man-hours regarding manufacturing. Ž<P>SOLUTION: The probe card 10 includes a probe substrate 1 and a plurality of contact probes 2 formed by laminating one or more plating layers on the probe substrate 1. Each contact probe 2 includes a beam part 11 elastically supporting a contact part 12 to be brought into contact with an inspection object and wiring part 13 extending from the beam part 11 toward a periphery part of the probe substrate 1. The wiring part 13 is formed as a plating layer the same as at least one plating layer constituting the beam part 11, and the pitch between adjacent contact probes 2 are wider as it approaches the periphery part of the probe substrate 1 from the beam part 11. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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