| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for forming a thin film, with which processes are simplified without using etchant when forming micro irregularities on the thin film. <P>SOLUTION: An inkjet head includes a plurality of injection nozzles injecting viscous ink distributed or dissolved in solvent by making a material of the thin film into particles. When ink is injected from the inkjet to a workpiece conveyed by a conveyance table 32, ink is injected so that ink injected from the injection nozzles becomes a convex curve shape on the workpiece 21, and adjacent inks make a continuous shape at end parts. When heating ink on the workpiece 21, evaporating solvent and thermally curing the material to the workpiece 21, slow heating is performed at a rise temperature at which inks formed in the workpiece 21 are sequentially and thermally cured toward a center from the end parts. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
