| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress variance in beam light condensation density including variation in height of a condensed beam position and variation in laser oscillation energy during crystallization using continuous oscillation laser light. Ž<P>SOLUTION: A uniform energy irradiation device includes a continuous oscillation laser light oscillation source which outputs the continuous oscillation laser light, a laser irradiation optical system which irradiates a substrate surface of a substrate to be processed placed on a substrate stage with the continuous oscillation laser light output by the continuous oscillation laser light oscillation source, a reflected light intensity measuring unit which irradiates a portion of an area, crystallized on the substrate surface by the irradiation with the continuous oscillation laser light, as a measurement area with illumination light in the visible light range and measures the reflected light intensity of reflected light reflected in the measurement area, a beam condensing position adjusting unit which adjusts the beam condensing position of the continuous oscillation laser light on an optical path between the continuous oscillation laser light oscillation source and laser irradiation optical system, and a control unit which inputs the reflected light intensity measured by the reflected light intensity measuring unit, and drives and controls the beam condensing position adjusting unit. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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