| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical heating device capable of manufacturing a polycrystal silicon (polysilicon) by flashing from a flash lamp to a non-crystal silicon (amorphous silicon) which is continuously transported, and to provide a method of manufacturing the polycrystal silicon. SOLUTION: The optical heating device heats an object which is continuously transported by radiating light and comprises a flashing part 3 equipped with a rod-like flash lamp 31 for flashing and a trough reflecting mirror 32 which reflects and condenses the light from the flash lamp 31, and a light radiating part 4 equipped with a rod-like lamp 41 for radiating continuous light and a trough reflecting mirror 42 which reflects and condenses the light from the lamp 41. The rod-like flash lamp 31 and the rod-like lamp 41 are arranged so that both lamps are parallel to each other in length direction and the length directions of both lamps are orthogonal to the transportation direction of the object. COPYRIGHT: (C)2010,JPO&INPIT
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