| 发明名称 |
Production Apparatus and Method of Producing a Light-Emitting Device by Using the Same Apparatus |
| 摘要 |
The present invention relates to a method for manufacturing a light-emitting device. At least one of a light-emitting film forming step, a conductive film forming step and an insulating film forming step is carried out while holding a substrate in a manner that an angle subtended by a surface of the substrate and the direction of gravity is within a range of from 0 to 30°.
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| 申请公布号 |
US2010029025(A1) |
申请公布日期 |
2010.02.04 |
| 申请号 |
US20090576694 |
申请日期 |
2009.10.09 |
| 申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI SHUNPEI;HAMADA TAKASHI;SEO SATOSHI |
| 分类号 |
H01L21/28;H05B33/10;B05C5/00;B05D1/02;B05D3/00;B41J2/01;H01L21/00;H01L31/10;H01L33/00;H01L51/00;H01L51/56 |
主分类号 |
H01L21/28 |
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