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经营范围
发明名称
Vacuum ultraviolet referencing reflectometer
摘要
申请公布号
KR100940129(B1)
申请公布日期
2010.02.03
申请号
KR20067005681
申请日期
2004.09.21
申请人
发明人
分类号
G01N21/55;G01J3/08;G01J3/28;G01J3/36;G01J3/42;G01N3/28;G01N21/21;G01N21/27;G01N21/33;G01N21/47
主分类号
G01N21/55
代理机构
代理人
主权项
地址
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