发明名称 |
Manufacturing method of display device and exposure system for that |
摘要 |
A display panel manufacturing method in which forming a thin film on a substrate and etching the thin film are repeated a plurality of times to form on the substrate a plurality of scanning signal lines, a plurality of video signal lines that three-dimensionally intersects the plurality of scanning signal lines with an insulating layer between them, and TFT elements and pixel electrodes each disposed in a pixel area enclosed with two adjacent scanning signal lines and two adjacent video signal lines. The method also includes: exposing a resist film using exposure dimensions numerically expressed based on design patterns prepared in advance; etching the thin film using etching resists formed by developing the exposed resist film so as to form thin-film patterns; and correcting the design patterns according to the complete dimensions of the formed thin-film patterns. |
申请公布号 |
US7655510(B2) |
申请公布日期 |
2010.02.02 |
申请号 |
US20070878397 |
申请日期 |
2007.07.24 |
申请人 |
HITACHI DISPLAYS, LTD. |
发明人 |
NAKAYOSHI YOSHIAKI;MIYAZAKI TAKAHIRO;OOIDA JUN;OHARA KEN |
分类号 |
H01L21/00;G02F1/1368;G03F1/00;G03F1/68;G09F9/00;G09F9/30;H01L21/84 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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