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发明名称
SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
KR100938737(B1)
申请公布日期
2010.01.26
申请号
KR20080013074
申请日期
2008.02.13
申请人
发明人
分类号
H01L21/677;H01L21/02;H01L21/027;H01L21/304
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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