发明名称 |
Method for fabricating a magnetic head including a read sensor |
摘要 |
A method for fabricating a magnetic head including a spin valve sensor having a sensor layer stack that includes a pinned magnetic layer, a spacer layer formed on the pinned magnetic layer, and a free magnetic layer formed on the spacer layer. In a preferred embodiment the spacer layer is comprised of CuOx. The method includes the plasma smoothing of the upper surface of the pinned magnetic layer prior to depositing the spacer layer, and a preferred plasma gas is a mixture of argon and oxygen.
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申请公布号 |
US7650684(B2) |
申请公布日期 |
2010.01.26 |
申请号 |
US20040892581 |
申请日期 |
2004.07.16 |
申请人 |
HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. |
发明人 |
LEE WEN-YAUNG;LIN TSANN;MAURI DANIELLE;ZELTSER ALEXANDER MICHAEL |
分类号 |
G11B5/127;C23C16/00;G11B5/012;G11B5/31;G11B5/33;G11B5/39;H01L43/08;H01L43/10;H01L43/12 |
主分类号 |
G11B5/127 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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