METAL CATALYST DOPING APPARATUS AND METHOD AND METHOD OF MANUFACTURING FLAT DISPLAY DEVICE USING THE SAME

摘要

PURPOSE: A metal catalyst doping apparatus and method and method of manufacturing flat display device using the same are provided to perform steadily doping process. CONSTITUTION: The cathode part is fixed according to the height direction of the processing chamber. The amorphous Si is formed on the substare(G). Cathode comprises a plurality of sub cathode parts. The plasma is formed in the front side. The blocking plate is located among a plurality of swelling pole portions between neighboring two swelling pole portions. The blocking plate crosses the moving boundary of the metal catalyst. The metallic catalyst is emitted from two swelling pole portions.