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发明名称
INSPECTING APPARATUS AND INSPECTING METHOD
摘要
申请公布号
KR100938492(B1)
申请公布日期
2010.01.25
申请号
KR20090084945
申请日期
2009.09.09
申请人
发明人
分类号
H01L21/66;H01L21/02
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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