DPS FOR PRE-TREATING A CRYO TRANSFER HOLDER OF TEM

摘要

PURPOSE: A dry pumping system for pre-treating a holder of a transmission electron microscope is provided to improve the degree of vacuum inside a holder by using a vacuum port having a wide cross section. CONSTITUTION: A dry pumping system includes a vacuum pump, a vacuum chamber, and a vacuum port(7) in which an air valve is mounted. The vacuum port is connected to the vacuum chamber through a cylinder(6). The vacuum chamber is divided into a first vacuum chamber and a second vacuum chamber by a gate valve. The first vacuum chamber(2) and the second vacuum chamber are exhausted by the vacuum pump. The vacuum port and the air valve are mounted to the second vacuum chamber(3).