| 摘要 |
<p>PURPOSE: A particle removing member of substrate processing equipment is provided to eliminate conveniently attached foreign substance. CONSTITUTION: In the release-treated polyester film releasing mold, the adhesive layer is formed. The ultraviolet hardening-type adhesive layer is formed in one side of the polyester film. The polyester film releasing mold is laminated in the surface of the ultraviolet hardening-type adhesive layer as the protection film. In the other side of the polyester film, the adhesive layer is laminated. Therefore, the lamination sheet of 5 layered structure is formed. The damping layer is formed.</p> |
