MICRO MULTI-DOF MANIPULATOR

摘要

PURPOSE: A multi-DOF micro manipulator is provided to perform high precision operation control by employing a multilayered piezoelectric actuator using a PMN-PT(PbMgNbO3-PbTiO3) monocrystal piezoelectric element. CONSTITUTION: A first moving object(120) is installed to move up and down within a horizontal path. A second moving object(130) is perpendicular to the first moving object and slides upward with friction. The second moving object is installed to move up and down within an upper path on a micro stage(110). A micro-processor applies power in the first and second moving objects. A first and a second PMN-PT multilayered piezoelectric actuator(140,150) are extended/restored by the micro-processor. A tip element(160) is operated by the fist and the second multilayered piezoelectric actuator.