发明名称 |
SUBSTRATE FOR METAL PRINTED CIRCUIT BOARD AND METHOD FOR MANUFACTURING THE SUBSTRATE |
摘要 |
<p>Disclosed are a substrate for a metal printed circuit board and a method for manufacturing the substrate. The method for manufacturing the substrate for a metal printed circuit board of the present invention includes a step of forming an insulating layer on a metal substrate through a sputtering method for physical vapor deposition, a step of depositing a first thin film, formed of conductive metal and having compressive residual stress, on the insulating layer through a sputtering method, a step of depositing a second thin film, formed of conductive metal and having tensile residual stress, on the first thin film through a sputtering method, and a step of depositing a thick electrical conductive layer with total residual stress controlled within a preset range by repeating the steps of depositing the first thin film and the second thin film.</p> |
申请公布号 |
WO2009145462(A3) |
申请公布日期 |
2010.01.21 |
申请号 |
WO2009KR01674 |
申请日期 |
2009.04.01 |
申请人 |
KOREA INSTRUMENT CO.,LTD.;KIM, KAB-SEOG;KIM, YONG-MO |
发明人 |
KIM, KAB-SEOG;KIM, YONG-MO |
分类号 |
C23C14/35;H05K3/16;H05K7/20 |
主分类号 |
C23C14/35 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|