发明名称 SUBSTRATE FOR METAL PRINTED CIRCUIT BOARD AND METHOD FOR MANUFACTURING THE SUBSTRATE
摘要 <p>Disclosed are a substrate for a metal printed circuit board and a method for manufacturing the substrate. The method for manufacturing the substrate for a metal printed circuit board of the present invention includes a step of forming an insulating layer on a metal substrate through a sputtering method for physical vapor deposition, a step of depositing a first thin film, formed of conductive metal and having compressive residual stress, on the insulating layer through a sputtering method, a step of depositing a second thin film, formed of conductive metal and having tensile residual stress, on the first thin film through a sputtering method, and a step of depositing a thick electrical conductive layer with total residual stress controlled within a preset range by repeating the steps of depositing the first thin film and the second thin film.</p>
申请公布号 WO2009145462(A3) 申请公布日期 2010.01.21
申请号 WO2009KR01674 申请日期 2009.04.01
申请人 KOREA INSTRUMENT CO.,LTD.;KIM, KAB-SEOG;KIM, YONG-MO 发明人 KIM, KAB-SEOG;KIM, YONG-MO
分类号 C23C14/35;H05K3/16;H05K7/20 主分类号 C23C14/35
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