| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of forming a pointed part, which easily sharpens a tip part, and a method of manufacturing a fine structure, which easily manufactures a fine structure with a pointed part. <P>SOLUTION: In this method, a pointed part 30 tapered toward a tip in a top-view and in a side-view is formed on a substrate 21 according to a density regulation area and a density distribution, by regulating the density distribution in the density regulation area to prepare a gray scale mask 25, and by exposing a photoresist layer 23 formed on the base material 21, using the gray scale mask 25, to be developed. The gray scale mask 25 makes an angle of the tip part narrower than that of a reference density regulation area corresponding to a target shape of the pointed part 30, or makes the density distribution of the tip part lower than a reference density distribution corresponding to the target shape of the pointed part 30. <P>COPYRIGHT: (C)2010,JPO&INPIT |
