发明名称 |
METHOD AND APPARATUS FOR REAL TIME FAULT DETECTION IN HIGH SPEED SEMICONDUCTOR PROCESSES |
摘要 |
An apparatus for collecting data during processing of a structure, such as a semiconductor wafer, which includes data collection devices or sensors positioned in a processing chamber for processing the wafer. The data collection sensors may operate at speeds of about 10 Hertz (Hz). A controller communicates and receives data from the data collection sensors. A data processing device communicates with the controller for receiving and processing the data, and the data processing device analyzes the data and determines at least one process response.
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申请公布号 |
US2010014748(A1) |
申请公布日期 |
2010.01.21 |
申请号 |
US20080176829 |
申请日期 |
2008.07.21 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
REATH MARK L.;WONG JUSTIN W.;CATLETT STEVEN;PASSOW MICHAEL L.;KOLAR HARRY R. |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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