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发明名称	APPARATUS FOR POLISHING SUBSTRATE
摘要
申请公布号	KR100937583(B1)	申请公布日期	2010.01.20
申请号	KR20070130357	申请日期	2007.12.13
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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