MICROMIRROR DEVICE AND METHOD FOR PRODUCING A MICROMIRROR DEVICE

摘要

The invention relates to a micromirror device, comprising a housing (10, 12), enclosing an inner volume (40), a mirror surface (28), arranged within the inner volume (40) and a light incidence window (14) arranged in a wall of the housing (10, 12), having a domed surface (42). The invention further relates to an optical device comprising a housing (10, 12), enclosing an inner volume (40), wherein an inner volume pressure (pI) exists in the inner volume (40), different from an external pressure (pA) in an external environment of the optical device and a pressure difference between the inner volume pressure (pI) and the external pressure (pA) is such that the light incidence window (14) is domed. The invention further relates to corresponding production methods for a micromirror device or an optical device.