发明名称 Semiconductor chip having pollished and ground bottom surface portions
摘要 A semiconductor chip having a thickness of 130 micrometers or less includes a mechanically ground bottom surface corresponding to a central circuit area, and a polished bottom surface corresponding to a peripheral scribe area. The mechanically ground bottom surface prevents heavy metals attached onto the bottom surface of the wafer from diffusing toward the source/drain regions of the semiconductor substrate and thereby from degrading the transistor characteristics.
申请公布号 US7649256(B2) 申请公布日期 2010.01.19
申请号 US20050176642 申请日期 2005.07.08
申请人 ELPIDA MEMORY, INC. 发明人 KUJIRAI HIROSHI;OYU KIYONORI
分类号 H01L21/30 主分类号 H01L21/30
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