| 摘要 |
<p>A heat treatment apparatus is provided with a cooling chamber (160) which cools a heated subject (M) to be treated. The cooling chamber is provided with a cooling unit (CU), which is provided with a transfer device (10) which simultaneously transfers, on a single line, a plurality of subjects to be treated, a mist cooling device (30) which is arranged to surround a transfer path of the transfer device and supplies a cooling liquid in a mist state, and a gas cooling device (20) which is arranged to surround the transfer path of the transfer device and supplies a cooling gas.</p> |
