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发明名称
Rohrförmiges Target und Verfahren zur Herstellung eines solchen Targets
摘要
申请公布号
DE50115242(D1)
申请公布日期
2010.01.14
申请号
DE20015015242
申请日期
2001.12.11
申请人
W.C. HERAEUS GMBH
发明人
HECK, RALF;LUPTON, DAVID FRANCIS DR.;STENGER, BERND;WARKENTIN, OLIVER DR.
分类号
C23C14/34;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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