| 摘要 |
PROBLEM TO BE SOLVED: To provide a refrigerating device and a charged particle beam device superior in magnetic shield, damping and heat radiation, with respect to the refrigerating device and the charged particle beam device. SOLUTION: This refrigerating device is composed of a compressor 40a for compressing a refrigerant gas, an expander to obtain a low temperature by expanding the refrigerant gas compressed by the compressor, a refrigerating machine 40 disposed between the compressor and the expander and comprising a radiator 40b for cooling the refrigerant gas compressed by the compressor, a first shield 41 mounted in a state of surrounding the compressor 40a and provided with a plurality of air flowing-in/out holes, a fan 44 for blowing off the air to the radiator, a second shield 42 provided with a slit 46a for air inflow and a slit 46b for air outflow, and surrounding the first shield 41, the radiator and the fan, and at least one mass damper 43 disposed on the compressor, the first shield or the second shield. COPYRIGHT: (C)2010,JPO&INPIT
|
