| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an FIMS system with a configuration for detecting a lid being suitably fixed to a pod during an operation to close a pod opening with the lid. Ž<P>SOLUTION: A step sensor is arranged which detects change of a step between the lid of the pod and a peripheral wall of the opening of the pod closed with the lid. The step sensor comprises a pair of a contact sensor for the lid and a contact sensor for the pod, and those sensors are each disposed on a door of FIMS or a peripheral wall of an opening portion closed with the door. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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