| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device such as an electron scanning microscope to construct a three-dimensional image (stereoscopic image) from an image obtained by the beam inclination of a right/left disparity angle. SOLUTION: A charged particle beam incident to a sample is set to be an inclined angle equivalent to the right/left disparity angle. In this constitution, a control part to carry out the beam inclination scanning of the disparity angle by one line unit is installed, scanning is carried out by a right/left inclination beam on the sample, and the image is obtained. Moreover, by combining a synthetically canceling means by an optical system of a multistage lens utilizing a swing-back action of the lens, and disparity beam control, the three-dimensional image in which the deterioration of a resolution is suppressed is displayed in an actual time (real time). COPYRIGHT: (C)2010,JPO&INPIT
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